JPH0550710B2 - - Google Patents

Info

Publication number
JPH0550710B2
JPH0550710B2 JP59266278A JP26627884A JPH0550710B2 JP H0550710 B2 JPH0550710 B2 JP H0550710B2 JP 59266278 A JP59266278 A JP 59266278A JP 26627884 A JP26627884 A JP 26627884A JP H0550710 B2 JPH0550710 B2 JP H0550710B2
Authority
JP
Japan
Prior art keywords
light
optical fiber
optical
light emitting
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59266278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61145476A (ja
Inventor
Yukio Sai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59266278A priority Critical patent/JPS61145476A/ja
Publication of JPS61145476A publication Critical patent/JPS61145476A/ja
Publication of JPH0550710B2 publication Critical patent/JPH0550710B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Radar Systems And Details Thereof (AREA)
JP59266278A 1984-12-19 1984-12-19 光学的距離測定装置 Granted JPS61145476A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59266278A JPS61145476A (ja) 1984-12-19 1984-12-19 光学的距離測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59266278A JPS61145476A (ja) 1984-12-19 1984-12-19 光学的距離測定装置

Publications (2)

Publication Number Publication Date
JPS61145476A JPS61145476A (ja) 1986-07-03
JPH0550710B2 true JPH0550710B2 (en]) 1993-07-29

Family

ID=17428736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59266278A Granted JPS61145476A (ja) 1984-12-19 1984-12-19 光学的距離測定装置

Country Status (1)

Country Link
JP (1) JPS61145476A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325182U (en]) * 1989-07-20 1991-03-14
JP3151581B2 (ja) * 1992-12-21 2001-04-03 株式会社トプコン 光波距離計
JP4732832B2 (ja) * 2005-08-17 2011-07-27 株式会社日立製作所 変位計測方法及びその装置、ステージ装置並びにプローブ顕微鏡
JP4707142B2 (ja) * 2005-11-04 2011-06-22 株式会社 ソキア・トプコン 光波距離計
JP2013117453A (ja) * 2011-12-05 2013-06-13 Hitachi Ltd 距離計測方法および装置とそれを搭載した形状計測装置

Also Published As

Publication number Publication date
JPS61145476A (ja) 1986-07-03

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